Mechanical Engineering
Introduction to Microelectromechanical Systems
3 credits
Fundamentals of MEMS (MicroElectroMechanical Systems). Microfabrication of MEMS with solid-state technology. LIGA and micro injection molding. Physics of MEMS. Operational principles of various MEMS devices. .
Average
82.2%
Students
18
Sections
2
Grade distribution. <50: 0, 50-54: 0, 55-59: 0, 60-63: 0, 64-67: 1, 68-71: 2, 72-75: 1, 76-79: 2, 80-84: 5, 85-89: 2, 90-100: 5.
Historical Averages
2024–2025
Lowest section avg
79.1%
Highest section avg
87.1%
Terms offered
2
Grade data from ubc-pair-grade-data.
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