Materials Engineering
Physics of Microfabrication: Front End Processing
3 credits
Practical aspects, physical models, and simulations of Si-based nanofabrication processes such as oxidation, diffusion, ion implantation, chemical vapor deposition, etching, stress techniques. Semiconductor device physic basics will also be discussed.
Average
84.5%
Students
6
Sections
1
Grade distribution. <50: 0, 50-54: 0, 55-59: 0, 60-63: 0, 64-67: 0, 68-71: 0, 72-75: 0, 76-79: withheld, 80-84: withheld, 85-89: withheld, 90-100: withheld.
Historical Averages
2015–2015
Lowest section avg
84.5%
Highest section avg
84.5%
Terms offered
1
Some grade ranges were withheld by UBC to protect student privacy and are not shown above.
Grade data from ubc-pair-grade-data.
| Section | Activity | Status | Time | Instructor |
|---|---|---|---|---|
| 201 | Lecture | Open | Tue 13:30-15:00, Thu 13:30-15:00 | Guangrui Xia |
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